Soichiro Okada

High-volume manufacturing equipment and processing for directed self-assembly applications

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations

Engineering, Electron-beam Lithography, Pattern Transfer +18

Driving DSA into volume manufacturing

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 14 citations

Engineering, Volume Manufacturing, Electron-beam Lithography +21

Fabrication of Size-Controlled Polyimide Nanoparticles

M. Suzuki, Hitoshi Kasai, Takayuki Ishizaka et al. · Journal of Nanoscience and Nanotechnology · 2007 · 13 citations

Materials Science, Nanoparticles, Chemical Engineering +10

Synthesis of Silica Nanoparticles with Physical Encapsulation of Near-Infrared Fluorescent Dyes and Their Tannic Acid Coating

Yoshio Nakahara, Yukiho Nakajima, Soichiro Okada et al. · ACS Omega · 2021 · 13 citations · Full text

Outlook for high-NA EUV patterning: a holistic patterning approach to address upcoming challenges

Angélique Raley, Lior Huli, Steven Grzeskowiak et al. · 2022 · 12 citations

Engineering, Electron-beam Lithography, Electronic Design Automation +16