Concepedia

Author

Lior Huli

In-Q-Tel

Also Known As

L. Huli, Lior Huli

51

Publications

339

Citations

9

H-Index

30

Concepts

All Affiliations

In-Q-TelApplied Materials (United States)IBM (United States)Tokyo Electron (Japan)University at Albany, State University of New York
LH

About

Lior Huli is an author at In-Q-Tel specializing in engineering, microelectronics, and computer engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

200

2

Computer Engineering

5

5

187

3

Applied Physics

4

4

176

4

Computer Science

2

2

24

5

Data Science

1

1

12

Lior Huli

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8

Publications

222

Citations

8

H-Index

YearCitations

22nm half-pitch patterning by CVD spacer self alignment double patterning (SADP)

Chris Bencher, Yong Mei Chen, Huixiong Dai,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008

128

EUV patterning successes and frontiers

Nelson Felix, Dan Corliss, Karen Petrillo,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

25

Driving down defect density in composite EUV patterning film stacks

Luciana Meli, Karen Petrillo, Anuja De Silva,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

13

Defect detection strategies and process partitioning for single-expose EUV patterning

Luciana Meli, Karen Petrillo, Anuja De Silva,

Journal of Micro/Nanolithography MEMS and MOEMS

2018

12

Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features

Ashim Dutta, Jennifer Church, Joe Lee,

2020

12

Outlook for high-NA EUV patterning: a holistic patterning approach to address upcoming challenges

Angélique Raley, Lior Huli, Steven Grzeskowiak,

2022

12

Double patterning combined with shrink technique to extend ArF lithography for contact holes to 22nm node and beyond

Xiangqun Miao, Lior Huli, Hao Chen,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008

10

EPE improvement thru self-alignment via multi-color material integration

Nihar Mohanty, Jeffrey Smith, Lior Huli,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2017

10

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