Statistics
Publications
4
Citations
139
H-Index
4
Active since
2008
Affiliations
Toshiba (Japan)(Current)
Ikuo Yoneda is an author at Toshiba (Japan) specializing in microfabrication, engineering, and nanoimprint lithography.
Publications per year
2008–2012
4
4
Nanoimprint lithography for semiconductor devices and future patterning innovation
Tatsuhiko Higashiki, Tetsuro Nakasugi, Ikuo Yoneda · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 63 citations · Full text
Engineering, Manufacturing Engineering, Materials Science +10
Study of nanoimprint lithography for applications toward 22nm node CMOS devices
Ikuo Yoneda, Shinji Mikami, Takumi Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 47 citations
Engineering, Computer Engineering, Electrical Engineering +13
A study of filling process for UV nanoimprint lithography using a fluid simulation
Ikuo Yoneda, Yasutada Nakagawa, Shinji Mikami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 15 citations
Engineering, Manufacturing Engineering, Materials Science +12
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