Statistics
Publications
2
Citations
62
H-Index
2
Active since
2008
Affiliations
Toshiba (Japan)(Current)
Takumi Ota is an author at Toshiba (Japan) specializing in nanolithography, nanotechnology, and 3d printing.
Publications per year
2008–2009
2
2
Study of nanoimprint lithography for applications toward 22nm node CMOS devices
Ikuo Yoneda, Shinji Mikami, Takumi Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 47 citations
Engineering, Electron-beam Lithography, Node Cmos Devices +20
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