Statistics
Publications
5
Citations
120
H-Index
5
Active since
2005
Affiliations
Shinji Mikami is an author at Kanazawa University specializing in engineering, computer engineering, and electrical engineering.
Publications per year
2005–2009
5
5
Study of nanoimprint lithography for applications toward 22nm node CMOS devices
Ikuo Yoneda, Shinji Mikami, Takumi Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 47 citations
Engineering, Electron-beam Lithography, Node Cmos Devices +20
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