Electroplating silicon and titanium in molten fluoride media

Jacques De Lépinay, J. Bouteillon, S. Traore, +2

Journal of Applied Electrochemistry

Materials ScienceMaterials EngineeringSolid-state IonicElectrometallurgyEngineering +3

In-Plane Silicon-On-Nothing Nanometer-Scale Resonant Suspended Gate MOSFET for In-IC Integration Perspectives

C. Durand, F. Casset, P. Renaux, +7

IEEE Electron Device Letters

EngineeringOutput Signal AmplificationIntegrated CircuitsSilicon On InsulatorMicro-electromechanical System +17

First 80 nm SON (Silicon-On-Nothing) MOSFETs with perfect morphology and high electrical performance

S. Monfray, T. Skotnicki, Y. Morand, +13

Device ModelingHigh Electrical PerformanceElectrical EngineeringPhysical Design (Electronics)Engineering +13

Silicon on nothing MEMS electromechanical resonator

C. Durand, F. Casset, P. Ancey, +7

Microsystem Technologies

EngineeringMicrofabricationNanoelectronicsMechanical EngineeringApplied Physics +3

Localized SOI technology: an innovative Low Cost self-aligned process for Ultra Thin Si-film on thin BOX integration for Low Power applications

S. Monfray, MP. Samson, D. Dutartre, +21

Sub XmlnsEngineeringDevice IntegrationLocalized SoiIntegrated Circuits +18

E × B probe measurements in molecular and electronegative plasmas

D. Renaud, Dennis Gerst, Stéphane Mazouffre, +1

Review of Scientific Instruments

EngineeringPlasma SciencePlasma PhysicsIon Beam InstrumentationElectron Spectroscopy +20

Microchannel cooling for the LHCb VELO Upgrade I

O. De Aguiar Francisco, W. Byczynski, Kazu Akiba, +60

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Planar Double Gate CMOS transistors with 40nm metal gate for multipurpose applications

M. Vinet, T. Poiroux, J. Widiez, +23

Electrical EngineeringMultipurpose ApplicationsEngineeringMetal GateNanoelectronics +3

NEMS Devices for Accelerometers Compatible with Thin SOI Technology

Eric Ollier, Laurent Duraffourg, M.T. Delaye, +9

Nems DevicesElectrical EngineeringElectronic InstrumentationEngineeringDevice Integration +12

Segmented subwavelength silicon gratings manufactured by high productivity microelectronic technologies for linear to radial/azimuthal polarization conversion

Thomas Kämpfe, Pierre Sixt, D. Renaud, +2

Optical Engineering

Polarization ConversionOptical MaterialsEngineeringSubwavelength Silicon GratingsOptoelectronic Devices +17