Concepedia

Publication | Open Access

Silicon on nothing MEMS electromechanical resonator

DOIFull Paper Access

22

Citations

9

References

2007

Year

C. Durand, F. Casset, P. Ancey, F. Judong, A. Talbot, Rémi Quenouillère, D. Renaud, Stéphan Borel, Brigitte Florin, L. Buchaillot
Microsystem Technologies

References

YearCitations

Page 1