N. Emonet

Evolution of materials technology for stacked-capacitors in 65nm embedded-DRAM

E. Gerritsen, N. Emonet, C. Caillat et al. · Solid-State Electronics · 2005 · 99 citations

Engineering, Materials Engineering, Materials Science +12

A functional 0.69 μm/sup 2/ embedded 6T-SRAM bit cell for 65 nm CMOS platform

F. Arnaud, F. Salvetti, D. Lenoble et al. · 2004 · 30 citations

Engineering, Computer Engineering, Electrical Engineering +17

Highly Reliable TiN/ZrO2/TiN 3D Stacked Capacitors for 45 nm Embedded DRAM Technologies

A. Berthelot, C. Caillat, V. Huard et al. · Proceedings of the European Solid State Device Research Conference · 2006 · 27 citations

Engineering, Electrical Engineering, Materials Science +17

Low cost 65nm CMOS platform for Low Power & General Purpose applications

F. Arnaud, B. Duriez, B. Tavel et al. · 2004 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +15

Work function tuning through dopant scanning and related effects in Ni fully silicided gate for sub-45nm nodes CMOS

D. Aimé, B. Froment, F. Cacho et al. · 2005 · 19 citations

Engineering, Electrical Engineering, Materials Science +17