Paul Gräupner

Electro-optical effect in aluminum nitride waveguides

Paul Gräupner, J.‐C. POMMIER, A. Cachard et al. · Journal of Applied Physics · 1992 · 53 citations

Aluminium Nitride, Waveguides, Optical Materials +18

Extending optical lithography with immersion

Bob Streefkerk, Jan Baselmans, Wendy Gehoel-van Ansem et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 33 citations

Optical Materials, Engineering, Electron-beam Lithography +16

High-NA EUV lithography: pushing the limits

Claus Zahlten, Paul Gräupner, Jan van Schoot et al. · 2019 · 33 citations

Interactions of 3D mask effects and NA in EUV lithography

Jens Timo Neumann, Paul Gräupner, Winfried Kaiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 32 citations

High-NA EUV lithography optics becomes reality

L. Wischmeier, Paul Gräupner, Peter Kürz et al. · 2020 · 32 citations

Optical Materials, Engineering, Electron-beam Lithography +21