Statistics
Publications
1
Citations
35
H-Index
1
Active since
2019
Affiliations
Carl Zeiss (Germany)(Current)
Claus Zahlten is an author at Carl Zeiss (Germany) specializing in focused ion beam lithography, digital fabrication, and obscuration effects.
Publications per year
2019–2019
1
1
High-NA EUV lithography: pushing the limits
Claus Zahlten, Paul Gräupner, Jan van Schoot et al. · 2019 · 35 citations
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