A. Cachard

Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane - Application to sensors able to operate in contact with liquid

Thierry Laurent, François O Bastien, Jean-Claude Pommier et al. · HAL (Le Centre pour la Communication Scientifique Directe) · 2000 · 66 citations

Engineering, Mechanical Engineering, Acoustic Sensor +23

Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane

Thierry Laurent, François O Bastien, Jean-Claude Pommier et al. · Sensors and Actuators A Physical · 2000 · 60 citations

Materials Engineering, Materials Science, Engineering +5

Electro-optical effect in aluminum nitride waveguides

Paul Gräupner, J.‐C. POMMIER, A. Cachard et al. · Journal of Applied Physics · 1992 · 53 citations

Aluminium Nitride, Waveguides, Optical Materials +18

Analysis of evaporated silicon oxide films by means of (d, p) nuclear reactions and infrared spectrophotometry

A. Cachard, J.A. Roger, J. Pivot et al. · physica status solidi (a) · 1971 · 46 citations

Engineering, Solid-state Chemistry, Chemistry +20

AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements

Abdelkrim Choujaa, N. Tirole, C. Bonjour et al. · Sensors and Actuators A Physical · 1995 · 40 citations

Aln/silicon Lamb-wave Microsensors, Engineering, Microfabrication +5