Publication | Closed Access
AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements
40
Citations
8
References
1995
Year
Aln/silicon Lamb-wave MicrosensorsEngineeringMicrofabricationApplied PhysicsSensor DesignInstrumentationSensor TechnologyMicromachined Ultrasonic Transducer
| Year | Citations | |
|---|---|---|
Page 1
Page 1