Jan Baselmans

Full optical column characterization of DUV lithographic projection tools

Mark van de Kerkhof, Wim de Boeij, Haico Kok et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 58 citations

Optical Design, Engineering, Ilias System +26

Extending optical lithography with immersion

Bob Streefkerk, Jan Baselmans, Wendy Gehoel-van Ansem et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 33 citations

Optical Materials, Engineering, Electron-beam Lithography +16

Performance of a step-and-scan system for DUV lithography

Gerard de Zwart, Martin A. van den Brink, Richard A. George et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 23 citations

Engineering, Electron-beam Lithography, Optic Design +19

Image quality in time-resolved transillumination of highly scattering media

Dimitrios G. Papaioannou, G. W. ’t Hooft, Jan Baselmans et al. · Applied Optics · 1995 · 22 citations

Optimizing and enhancing optical systems to meet the low k 1 challenge

Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations

Optical Materials, Engineering, Microscopy +30