Statistics
Publications
4
Citations
102
H-Index
4
Active since
1988
Affiliations
Mapper Lithography (Netherlands)(Current)
Martin A. van den Brink is an author at Mapper Lithography (Netherlands) specializing in optical alignment, overlay accuracy, and manufacturing processes.
Publications per year
1988–1997
4
4
Matching Performance For Multiple Wafer Steppers Using An Advanced Metrology Procedure
Martin A. van den Brink, C. G. de Mol, R. A. George · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 38 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
<title>Step-and-scan and step-and-repeat: a technology comparison</title>
Martin A. van den Brink, Hans Jasper, Steve D. Slonaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 24 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +10
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