Concepedia
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Publications
1
Citations
16
H-Index
Active since
1990
H. F. D. Linders is an author specializing in optical system alignment, lens design, and overlay control.
Publications per year
1990–1990
Deep-UV wafer stepper with through-the-lens wafer to reticle alignment
S. Wittekoek, Martin A. van den Brink, H. F. D. Linders et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations
Natural Sciences, Physics, Optics +12
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