Statistics
Publications
3
Citations
77
H-Index
3
Active since
1996
Affiliations
Nikon (United States)(Current)
Steve D. Slonaker is an author at Nikon (United States) specializing in optics, step-and-repeat lithography, and manufacturing processes.
Publications per year
1996–2010
3
3
<title>Step-and-scan and step-and-repeat: a technology comparison</title>
Martin A. van den Brink, Hans Jasper, Steve D. Slonaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 24 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +10
Gary Zhang, Changan Wang, Colin Tan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations
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