Concepedia
Statistics
Publications
26
Citations
661
H-Index
19
Active since
1986
Affiliations
Carl Zeiss (Germany)(Current)
ASML (Netherlands)
Carl Zeiss (United States)
Osnabrück University
IMEC
Jens Timo Neumann is an author at Carl Zeiss (Germany) specializing in natural sciences, optics, and physics.
Publications per year
1986–2024
EUV lithography optics for sub-9nm resolution
Bernhard Kneer, Sascha Migura, Winfried Kaiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 66 citations
Natural Sciences, Physics, Biomedical Imaging +12
High-numerical aperture extreme ultraviolet scanner for 8-nm lithography and beyond
Jan van Schoot, Eelco van Setten, Gijsbert Rispens et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 54 citations
Engineering, Materials Engineering, Physics +12
Direct laser writing of surface reliefs in dry, self-developing photopolymer films
Jens Timo Neumann, Kay S. Wieking, Detlef Kip · Applied Optics · 1999 · 42 citations
Engineering, Materials Engineering, Materials Science +17
Actinic characterization and modeling of the EUV mask stack
Vicky Philipsen, Eric Hendrickx, R. Jonckheere et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 37 citations
Natural Sciences, Materials Engineering, Materials Science +14
Interactions of 3D mask effects and NA in EUV lithography
Jens Timo Neumann, Paul Gräupner, Winfried Kaiser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 32 citations
Engineering, Materials Engineering, Biomedical Optics +7
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