S. List

Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

John S. Villarrubia, András Vládar, Bin Ming et al. · Ultramicroscopy · 2015 · 111 citations · Full text

Engineering, Electron Microscopy, Physics +13

Determining the shape and periodicity of nanostructures using small-angle X-ray scattering

Daniel F. Sunday, S. List, J. S. Chawla et al. · Journal of Applied Crystallography · 2015 · 78 citations

X-ray Crystallography, X-ray Spectroscopy, Engineering +19

Air-gap formation during IMD deposition to lower interconnect capacitance

B.P. Shieh, Krishna C. Saraswat, J.P. McVittie et al. · IEEE Electron Device Letters · 1998 · 64 citations

Engineering, Metal Lines, Chemical Deposition +16

Phase identification of self-forming Cu–Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structure

J. M. Ablett, J. C. Woicik, Zs. Tôkei et al. · Applied Physics Letters · 2009 · 50 citations

Engineering, Sio2 Dielectrics, Solid-state Chemistry +17

Performance Comparison of Interconnect Technology and Architecture Options for Deep Submicron Technology Nodes

Mandeep Bamal, S. List, Michele Stucchi et al. · 2006 · 50 citations

Engineering, Different Metrics, Energy Efficiency +20