Publication | Open Access
Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
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Citations
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References
2015
Year
EngineeringElectron MicroscopyPhysicsMicrofabricationMicroscopySpectroscopyMedicineApplied PhysicsMicroscopy MethodScanning Probe MicroscopyMicroanalysisElectron MicroscopeInstrumentationElectron Microscope MeasurementJmonsel-modeled LibraryBiophysics
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