Modulation of charge trapping and current-conduction mechanism of TiO2-doped HfO2 gate dielectrics based MOS capacitors by annealing temperature

J.W. Zhang, Gang He, H.S. Chen, Juan Gao, X.F. Chen, D.Q. Xiao, Rui Ma, M. Liu, Zhaoqi Sun

Journal of Alloys and Compounds · 2015 · 32 citations · 23 references

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