Journal of Alloys and Compounds · 2014 · 176 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSurface ScienceThin FilmsOptical Thin FilmsOxide SemiconductorsThin Film Optical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsInterfacial PropertiesMicrostructureMicrostructure EffectsMicrostructure OptimizationSputter DepositionThin Oxide FilmsThin Oxide LayersThin-film Morphology
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A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics
F. Chen, Xu Bin, Curtiss Jae Hella et al. · Microelectronic Engineering · 2004 · 89 citations
Natural Sciences, Materials Engineering, Materials Science +12