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Modulating microstructure and thermal properties of diamond/SiNx/GaN multilayer structure by diamond growth temperature

Materials ScienceDiamond-like CarbonWide-bandgap SemiconductorEngineeringDiamond Growth TemperatureApplied PhysicsAluminum Gallium NitrideDiamond/sinx/gan Multilayer StructureGan Power DeviceMicrostructureThermal Properties