IEEE Circuits and Devices Magazine · 1993 · 57 citations · 14 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsMems DesignMems FabricationMems SensorsMicromachiningElectromechanical CouplingFabricationFabrication TechniquesMicroactuatorsMicroelectromechanical System Fabrication
The microfabrication techniques used to develop high-performance closed-loop-controlled microelectromechanical systems (MEMS) are discussed. A generalized MEMS could consist of mechanical components, sensors, actuators, and electronics, all integrated in the same environment. Bulk and surface micromachining, substrate bonding, and electroforming in conjunction with X-ray lithography, all integral components of silicon micromachining, are described. The development of a materials base for MEMS and a variety of physical phenomena for microactuator applications that have recently been demonstrated are reviewed. The applications and future trends of MEMS technologies are discussed.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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