Thin-film processing of TiNi shape memory alloy

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text

Engineering, Materials Engineering, Mechanical Engineering +12

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Design considerations for a practical electrostatic micro-motor

William S. Trimmer, K.J. Gabriel · Sensors and Actuators · 1987 · 229 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

A New Actuator of a Joint Mechanism Using TiNi Alloy Wire

Katsutoshi Kuribayashi · The International Journal of Robotics Research · 1986 · 132 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Shape-Memory Alloys

L. McDonald Schetky · Scientific American · 1979 · 129 citations