Sensors and Actuators · 1987 · 229 citations · 0 references
EngineeringElectrical EngineeringMechatronics EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationElectric MotorsElectric PropulsionElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignElectrostatic Mems ActuatorsElectrostatic MicroactuatorsElectrostatic MicromotorsElectrostatic PropulsionModeling Of Electrostatic Actuators