Robotics and Computer-Integrated Manufacturing · 2018 · 52 citations · 40 references
EngineeringMechanical EngineeringRobotics EngineeringActuatorsMicroelectromechanical SystemsNanotechnologyActuator DesignActuator IntegrationMems ActuatorsMems DesignNanoelectromechanical SystemsPayload IntegrationMicro-positioning SystemsMicropositioning SystemsMicroscale Positioning SystemsMiniature Positioning StagesNanopositioningNanopositioning SystemsPayload Capacity
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