Concepedia

Micropositioning Systems

Micropositioning Systems is a precision motion control system that enables sub-micron or nanometer-scale positioning accuracy, distinguished by its integration of electrostatic actuators for high-resolution, low-inertia movement in applications requiring extreme spatial control.

380

Publications

15.8K

Citations

977

Authors

290

Institutions

Publications per year

2017–2026

66

Parents

Publications

380

High bandwidth nano-positioner: A robust control approach

Srinivasa M. Salapaka, Abu Sebastian, J. P. Cleveland et al. · Review of Scientific Instruments · 2002 · 416 citations

, , +16

Position Control in Lithographic Equipment [Applications of Control]

Hans Butler · IEEE Control Systems · 2011 · 402 citations

, , +17

Design methodologies for robust nano-positioning

Abu Sebastian · IEEE Transactions on Control Systems Technology · 2005 · 304 citations

, , +17

Micron: An Actively Stabilized Handheld Tool for Microsurgery

Robert A. MacLachlan, Brian C. Becker, Jaime Cuevas Tabares et al. · IEEE Transactions on Robotics · 2011 · 263 citations · Full text

, , +17

Microsyringe-Based Deposition of Two-Dimensional and Three-Dimensional Polymer Scaffolds with a Well-Defined Geometry for Application to Tissue Engineering

Giovanni Vozzi, Antonino Previti, Danilo De Rossi et al. · Tissue Engineering · 2002 · 248 citations

, , +17

1–5 of 380

Authors

977

  1. QX
    Qingsong Xu

    University of Macau, Macao SAR China

    21 publications · 1.3K citations

    16

    h-index

  2. BS
    Bijan Shirinzadeh

    Monash University, Australia

    14 publications · 598 citations

    11

    h-index

  3. YT
    Yanling Tian

    Tianjin University, China

    10 publications · 335 citations

    10

    h-index

  4. YL
    Yangmin Li

    University of Macau, Macao SAR China

    9 publications · 521 citations

    9

    h-index

  5. MR
    Micky Rakotondrabe

    Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, France

    9 publications · 399 citations

    9

    h-index

1–5 of 977

Institutions

290

  1. University of Macau

    Macao, Macao

    19 h-index

    45 publications

    2.3K citations

  2. École Nationale Supérieure de Mécanique et des Microtechniques

    Besançon, France

    13 h-index

    43 publications

    1.2K citations

  3. Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies

    Besançon, France

    13 h-index

    55 publications

    1.2K citations

  4. Centre National de la Recherche Scientifique

    Paris, France

    13 h-index

    69 publications

    1.9K citations

  5. Monash University

    Melbourne, Australia

    12 h-index

    49 publications

    1.9K citations

  6. Tianjin University

    Tianjin, China

    11 h-index

    30 publications

    1.5K citations

  7. The University of Tokyo

    Tokyo, Japan

    8 h-index

    22 publications

    604 citations

  8. Université de Franche-Comté

    Besançon, France

    8 h-index

    27 publications

    893 citations

1–8 of 290

Venues

  1. Review of Scientific Instruments

    32 publications · 1.6K citations

    19

    h-index

  2. Precision Engineering

    17 publications · 956 citations

    17

    h-index

  3. IEEE/ASME Transactions on Mechatronics

    20 publications · 1.4K citations

    17

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 14 publications · 654 citations

    13

    h-index

  5. Sensors and Actuators A Physical

    11 publications · 511 citations

    11

    h-index

1–5