Hans Butler

Position Control in Lithographic Equipment [Applications of Control]

Hans Butler · IEEE Control Systems · 2011 · 402 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Position control in lithographic equipment

Hans Butler, W Simons · TU/e Research Portal · 2013 · 111 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Model reference adaptive control of a gantry crane scale model

Hans Butler, G. Honderd, J. van Amerongen · IEEE Control Systems · 1991 · 106 citations

Engineering, Systems Engineering, Process Control +11

Control of Wafer Scanners: Methods and Developments

Marcel Heertjes, Hans Butler, Nic Dirkx et al. · 2020 · 81 citations

Engineering, Manufacturing Engineering, Mechatronics Engineering +17

Adaptive Feedforward for a Wafer Stage in a Lithographic Tool

Hans Butler · IEEE Transactions on Control Systems Technology · 2012 · 70 citations

Engineering, Electrical Engineering, Manufacturing Engineering +16