Concepedia

Marcel Heertjes

MH

Statistics

Publications

66

Citations

1.9K

H-Index

27

Active since

1997

Affiliations

Eindhoven University of Technology(Current)

ASML (Netherlands)

Philips (Netherlands)

Marcel Heertjes is an author at Eindhoven University of Technology specializing in engineering, mechanical systems, and systems engineering.

Top concepts

EngineeringMechanical SystemsSystems EngineeringMechatronicsVibration ControlProcess ControlControl DesignSpace EngineeringComputer EngineeringStability

Publications per year

1997–2024

66

Publications

66

MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm

Marcel Heertjes, Daan Hennekens, M. Steinbuch · Control Engineering Practice · 2010 · 108 citations

Electrical Engineering, Wafer Scale Processing, Engineering +9

Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System

Marcel Heertjes, Bart Van der Velden, Tom Oomen · IEEE Transactions on Control Systems Technology · 2015 · 105 citations · Full text

Engineering, Robust Control, Robustness Constraints +16

Industry engagement with control research: Perspective and messages

Tarıq Samad, Margret Bauer, Scott A. Bortoff et al. · Annual Reviews in Control · 2020 · 98 citations · Full text

Control of Wafer Scanners: Methods and Developments

Marcel Heertjes, Hans Butler, Nic Dirkx et al. · 2020 · 75 citations

Engineering, Instrumentation Engineering, Mechatronic System +17

Nonlinear iterative learning control with applications to lithographic machinery

Marcel Heertjes, Tim Tso · Control Engineering Practice · 2007 · 72 citations

Engineering, Intelligent Control, Process Control +2

1–5 of 66