Concepedia

Marcel Heertjes

MH

Statistics

Publications

69

Citations

2.1K

H-Index

27

Active since

1997

Affiliations

Eindhoven University of Technology(Current)

ASML (Netherlands)

Philips (Netherlands)

Delft University of Technology

Memorial University of Newfoundland

Marcel Heertjes is an author at Eindhoven University of Technology specializing in engineering, control systems, and control theory.

Publications per year

1997–2024

69

Publications

69

MIMO feed-forward design in wafer scanners using a gradient approximation-based algorithm

Marcel Heertjes, Daan Hennekens, M. Steinbuch · Control Engineering Practice · 2010 · 111 citations

Engineering, Electrical Engineering, Manufacturing Engineering +10

Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System

Marcel Heertjes, Bart Van der Velden, Tom Oomen · IEEE Transactions on Control Systems Technology · 2015 · 107 citations · Full text

Engineering, Industrial Engineering, Mathematics +17

Industry engagement with control research: Perspective and messages

Tarıq Samad, Margret Bauer, Scott A. Bortoff et al. · Annual Reviews in Control · 2020 · 102 citations · Full text

Engineering, Industrial Engineering, Operations Research +6

Control of Wafer Scanners: Methods and Developments

Marcel Heertjes, Hans Butler, Nic Dirkx et al. · 2020 · 81 citations

Engineering, Manufacturing Engineering, Mechatronics Engineering +17

Nonlinear iterative learning control with applications to lithographic machinery

Marcel Heertjes, Tim K. Tso · Control Engineering Practice · 2007 · 72 citations

Engineering, Manufacturing Engineering, Mechatronics Engineering +10

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