Statistics
Publications
3
Citations
109
H-Index
3
Active since
2016
Affiliations
Nic Dirkx is an author at ASML (Netherlands) specializing in manufacturing engineering, mechatronics engineering, and engineering.
Publications per year
2016–2020
3
3
Control of Wafer Scanners: Methods and Developments
Marcel Heertjes, Hans Butler, Nic Dirkx et al. · 2020 · 81 citations
Engineering, Manufacturing Engineering, Mechatronics Engineering +17
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