Concepedia

Nic Dirkx

ND

Statistics

Publications

3

Citations

102

H-Index

3

Active since

2016

Affiliations

ASML (Netherlands)(Current)

Eindhoven University of Technology

Nic Dirkx is an author at ASML (Netherlands) specializing in mechanical systems, instrumentation, and control design.

ORCID

Top concepts

Publications per year

2016–2020

3

Publications

3

Control of Wafer Scanners: Methods and Developments

Marcel Heertjes, Hans Butler, Nic Dirkx et al. · 2020 · 75 citations

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Estimating structural deformations for inferential control: a disturbance observer approach

Robbert Voorhoeve, Nic Dirkx, Teun Melief et al. · IFAC-PapersOnLine · 2016 · 15 citations · Full text

Frequency Response Function identification for multivariable motion control: Optimal experiment design with element-wise constraints

Nic Dirkx, Jeroen van de Wijdeven, Tom Oomen · Mechatronics · 2020 · 12 citations · Full text

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