Design and Analysis of a Totally Decoupled Flexure-Based XY Parallel Micromanipulator

Abstract

In this paper, a concept of totally decoupling is proposed for the design of a flexure parallel micromanipulator with both input and output decoupling. Based on flexure hinges, the design procedure for an XY totally decoupled parallel stage (TDPS) is presented, which is featured with decoupled actuation and decoupled output motion as well. By employing (double) compound parallelogram flexures and a compact displacement amplifier, a class of novel XY TDPS with simple and symmetric structures are enumerated, and one example is chosen for further analysis. The kinematic and dynamic modeling of the manipulator are conducted by resorting to compliance and stiffness analysis based on the matrix method, which are validated by finite-element analysis (FEA). In view of predefined performance constraints, the dimension optimization is carried out by means of particle swarm optimization, and a prototype of the optimized stage is fabricated for performance tests. Both FEA and experimental studies well validate the decoupling property of the XY stage that is expected to be adopted into micro-/nanoscale manipulations.