Concepedia

Publication | Open Access

Very high frequency plasma reactant for atomic layer deposition

DOIFull Paper Access

20

Citations

54

References

2016

Year

Il‐Kwon Oh, Gilsang Yoo, Chang Mo Yoon, Tae Hyung Kim, Geun Young Yeom, Kangsik Kim, Zonghoon Lee, Hanearl Jung, Chang Wan Lee, Hyungjun Kim,
Applied Surface Science

References

YearCitations

Page 1