Concepedia

Author

Chang Mo Yoon

Yonsei University

Also Known As

Chang Mo Yoon

14

Publications

261

Citations

7

H-Index

17

Concepts

All Affiliations

Yonsei UniversityIncheon National UniversityJeonbuk National UniversityKorea Institute of Industrial Technology
CM

About

Chang Mo Yoon is an author at Yonsei University specializing in engineering, applied physics, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

4

4

84

2

Applied Physics

4

4

84

3

Materials Science

3

3

56

4

Electrical Engineering

2

2

47

5

Chemistry

1

1

51

Chang Mo Yoon

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7

Publications

256

Citations

7

H-Index

YearCitations

Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al<sub>2</sub>O<sub>3</sub> Nanopatterns

Seunggi Seo, Byung Chul Yeo, Sang Soo Han,

ACS Applied Materials & Interfaces

2017

98

Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor

Taewook Nam, Hyunho Lee, Taejin Choi,

Applied Surface Science

2019

51

The Impact of an Ultrathin Y<sub>2</sub>O<sub>3</sub>Layer on GeO<sub>2</sub>Passivation in Ge MOS Gate Stacks

Yujin Seo, Tae In Lee, Chang Mo Yoon,

IEEE Transactions on Electron Devices

2017

28

Effects of Ar Addition to O<sub>2</sub> Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films

Hanearl Jung, Il‐Kwon Oh, Chang Mo Yoon,

ACS Applied Materials & Interfaces

2018

23

Very high frequency plasma reactant for atomic layer deposition

Il‐Kwon Oh, Gilsang Yoo, Chang Mo Yoon,

Applied Surface Science

2016

20

Water-Erasable Memory Device for Security Applications Prepared by the Atomic Layer Deposition of GeO<sub>2</sub>

Chang Mo Yoon, Il‐Kwon Oh, Yujin Lee,

Chemistry of Materials

2018

19

The impact of atomic layer deposited SiO<sub>2</sub>passivation for high-k Ta<sub>1−x</sub>Zr<sub>x</sub>O on the InP substrate

Chandreswar Mahata, Il‐Kwon Oh, Chang Mo Yoon,

Journal of Materials Chemistry C

2015

17

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