Concepedia

S. B. S. Heil

SB

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Publications

17

Citations

2.3K

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16

Active since

2005

Affiliations

Eindhoven University of Technology(Current)

Plasma (Macedonia)

Philips (Netherlands)

NXP (Netherlands)

Oxford Instruments (United Kingdom)

S. B. S. Heil is an author at Eindhoven University of Technology specializing in applied physics, engineering, and surface science.

Top concepts

Publications per year

2005–2014

17

Publications

17

Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3

Bram Hoex, S. B. S. Heil, E. Langereis et al. · Applied Physics Letters · 2006 · 712 citations · Full text

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<i>In situ</i>spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition

E. Langereis, S. B. S. Heil, Harm C. M. Knoops et al. · Journal of Physics D Applied Physics · 2009 · 285 citations

Plasma and Thermal ALD of Al[sub 2]O[sub 3] in a Commercial 200 mm ALD Reactor

J. Leo van Hemmen, S. B. S. Heil, J.H. Klootwijk et al. · Journal of The Electrochemical Society · 2007 · 268 citations · Full text

Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers

E. Langereis, Mariadriana Creatore, S. B. S. Heil et al. · Applied Physics Letters · 2006 · 266 citations · Full text

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Deposition of TiN and HfO2 in a commercial 200mm remote plasma atomic layer deposition reactor

S. B. S. Heil, J. Leo van Hemmen, C. J. Hodson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2007 · 126 citations · Full text

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