Microelectronic Engineering · 2011 · 11 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials PhysicsSemiconductor MaterialsSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor SurfacesSurface PhysicsThin Film AnnealingThin Film Electrical PropertiesAnnealing EffectsAnnealing Temperature EffectsAnnealing Time EffectsContact AnnealingMicrostructural ChangeMicrostructural CharacterizationSurface AnnealingTemperature Dependency
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Masaharu Kobayashi, Atsuhiro Kinoshita, Krishna C. Saraswat et al. · Journal of Applied Physics · 2009 · 208 citations
Andrew Ritenour, A. Khakifirooz, D.A. Antoniadis et al. · Applied Physics Letters · 2006 · 73 citations