Characterization of Microdose Damage Caused by Single Heavy Ion Observed in Trench Type Power MOSFETs

S. Kuboyama, Akifumu Maru, Naomi Ikeda, Toshio Hirao, Takashi Tamura

IEEE Transactions on Nuclear Science · 2010 · 25 citations · 6 references

Concepts

Abstract

It was demonstrated that anomalously large degradation observed in power MOSFETs was caused by a single heavy ion. It was identified as a microdose effect and successfully characterized by several parameters extracted from the experimental data.

References

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