Process research of high aspect ratio microstructure using SU-8 resist - Concepedia

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Process research of high aspect ratio microstructure using SU-8 resist

91

Citations

11

References

2004

Year

JianGuo LIU, B.C. Cai, Jianzhuo zhu, Guifu Ding, Xiaomei Zhao, Chung‐Shi Yang, Daiyao Chen Daiyao Chen

Microsystem Technologies

Materials ScienceMaterials EngineeringWafer Scale ProcessingEngineeringMicrofabricationMechanical EngineeringFabrication TechniqueHigh-performance MaterialSemiconductor Device FabricationMaterial PerformanceProcess ResearchElectronic PackagingMicroelectronicsMicrostructure

References

	Year	Citations

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