Concepedia

JianGuo LIU

JL

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Publications

1

Citations

91

H-Index

1

Active since

2004

Affiliations

Advanced Micro-Fabrication Equipment (China)(Current)

JianGuo LIU is an author at Advanced Micro-Fabrication Equipment (China) specializing in materials engineering, microfabrication, and mechanical engineering.

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Publications per year

2004–2004

1

Publications

1

Process research of high aspect ratio microstructure using SU-8 resist

JianGuo LIU, B.C. Cai, Jianzhuo zhu et al. · Microsystem Technologies · 2004 · 91 citations

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