Concepedia

Author

JianGuo LIU

Advanced Micro-Fabrication Equipment (China)

Also Known As

J. Liu, JianGuo LIU

2

Publications

91

Citations

1

H-Index

8

Concepts

All Affiliations

Advanced Micro-Fabrication Equipment (China)
JL

About

JianGuo LIU is an author at Advanced Micro-Fabrication Equipment (China) specializing in materials engineering, microfabrication, and mechanical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

91

2

Materials Engineering

1

1

91

3

Materials Science

1

1

91

4

Mechanical Engineering

1

1

91

5

Microelectronics

1

1

91

JianGuo LIU

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1

Publications

91

Citations

1

H-Index

YearCitations

Process research of high aspect ratio microstructure using SU-8 resist

JianGuo LIU, B.C. Cai, Jianzhuo zhu,

Microsystem Technologies

2004

91

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