Publication | Closed Access
Nucleation, growth and dissolution of extended defects in implanted Si: impact on dopant diffusion
81
Citations
17
References
1999
Year
Materials ScienceEngineeringMicrostructureExtended DefectsIntrinsic ImpurityApplied PhysicsDefect FormationImplanted SiSemiconductor Device FabricationSilicon On InsulatorDopant Diffusion
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