High aspect ratio ultrathick micro-stencil by JSR THB-430N negative UV photoresist

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text

Engineering, Materials Engineering, Materials Science +11

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Micromachining applications of a high resolution ultrathick photoresist

Kangsik Lee, N. LaBianca, S. A. Rishton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 380 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

H. Lorenz, M. Despont, P. Vettiger et al. · Microsystem Technologies · 1998 · 149 citations · Full text

Engineering, Materials Engineering, Materials Science +8

Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic

L. Guérin, M. Bossel, Michel Demierre et al. · 2002 · 138 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +17