Fabrication of InP-based freestanding microstructures by selective surface micromachining

Abstract

InP-based microstructuring methods are presented with a view to develop micro opto electro mechanical systems (MOEMS). Fabrication parameters and dimensions of the freestanding structures are determined for specific technological constraints (etching selectivities, anisotropy, sticking phenomena). thick InGaAs deformable cantilevers, bridges and membranes have been fabricated by elimination of around -thick InAlAs sacrificial layers. Showing high aspect ratio, smooth surfaces and high accuracy in thicknesses, these microstructures are perfectly suitable for optical applications.