A force-feedback control system for micro-assembly

Abstract

In this paper, we report the development of an explicit force-feedback control system for micro-assembly, focusing on the key issues of force transmission and control. The force-feedback system is incorporated with a compound flexure stage, which is driven by a voice-coil actuator and designed to provide frictionless translation motion along one axis. A force sensor measures the interaction force between the micromanipulator and its environment, while an explicit force controller controls the interaction force to follow a desired force trajectory. The effectiveness of this prototype force-control system has been demonstrated in an experimental application, where parts (with dimensions in microns) were picked up and assembled under explicit force-feedback control.