Applied Surface Science · 2006 · 43 citations · 34 references
Natural SciencesChemistryMaterials ScienceInorganic ChemistryMaterials ChemistryPhysical ChemistryAluminum OxidesAtomic Layer DepositionInorganic MaterialsSurface PhysicsAluminaAtomic Layer Deposition InterfacesAtomic Layer Deposition PrecursorsSilica SupportsSilicate ChemistrySurface Chemistry Of AluminaSurface Chemistry Of Silica
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Surface Chemistry for Atomic Layer Growth
Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations
Atomic Layer Deposition of Platinum Thin Films
Titta Aaltonen, Mikko Ritala, Timo Sajavaara et al. · Chemistry of Materials · 2003 · 391 citations
Ruthenium Thin Films Grown by Atomic Layer Deposition
Titta Aaltonen, Petra Alén, Mikko Ritala et al. · Chemical Vapor Deposition · 2003 · 277 citations
Natural Sciences, Materials Engineering, Materials Science +16