Journal of Crystal Growth · 1994 · 105 citations · 10 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionDopingMemory DevicesPhysical Vapor DepositionSemiconductor Device MaterialsDoping Effects On Device PerformanceGallium Nitride (Gan) MaterialsMemory EffectsMemory MaterialsMetalorganic Chemical Vapor Deposition
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