Synthesis of crystallized TaON and Ta3N5 by nitridation of Ta2O5 thin films grown by pulsed laser deposition - Concepedia

Concepedia

Publication | Closed Access

Synthesis of crystallized TaON and Ta3N5 by nitridation of Ta2O5 thin films grown by pulsed laser deposition

47

Citations

31

References

2003

Year

Marie Kerlau, Odile Merdrignac‐Conanec, Maryline Guilloux‐Viry, A. Perrin

Solid State Sciences

Materials ScienceChemical EngineeringEngineeringNanotechnologyTa2o5 Thin FilmsThin FilmsPulsed Laser DepositionChemical Vapor Deposition

References

	Year	Citations

Page 1