Concepedia

Synthesis of crystallized TaON and Ta3N5 by nitridation of Ta2O5 thin films grown by pulsed laser deposition

Marie Kerlau, Odile Merdrignac‐Conanec, Maryline Guilloux‐Viry, A. Perrin

Solid State Sciences · 2003 · 48 citations · 31 references

DOI

Concepts

References

31

Tantalum as a diffusion barrier between copper and silicon: Failure mechanism and effect of nitrogen additions

Karen Holloway, P. M. Fryer, C. Cabral et al. · Journal of Applied Physics · 1992 · 448 citations

, , +17

Comparative study of tantalum and tantalum nitrides (Ta2N and TaN) as a diffusion barrier for Cu metallization

Kyung-Hoon Min, Kyu-Chang Chun, Ki‐Bum Kim · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 261 citations

, , +17

The electronic structure of tantalum (oxy)nitrides TaON and Ta3N5

Changming Fang, Emmanuelle Orhan, G. A. de Wijs et al. · Journal of Materials Chemistry · 2001 · 186 citations · Full text

, , +17

Controlled Growth of TaN, Ta<sub>3</sub>N<sub>5</sub>, and TaO<i><sub>x</sub></i>N<i><sub>y</sub></i> Thin Films by Atomic Layer Deposition

Mikko Ritala, Pia Kalsi, Diana Riihelä et al. · Chemistry of Materials · 1999 · 158 citations

, , +17

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

M. Stavrev, D. Fischer, Christian Wenzel et al. · Thin Solid Films · 1997 · 155 citations

, , +13