Concepedia

Kyu-Chang Chun

KC

1

Publications

259

Citations

1

H-Index

1996

Active since

Affiliations

Seoul National University(Current)

Kyu-Chang Chun is an author at Seoul National University specializing in materials engineering, thin films, and chemical engineering.

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Publications per year

1996–1996

1

Publications

1

Comparative study of tantalum and tantalum nitrides (Ta2N and TaN) as a diffusion barrier for Cu metallization

Kyung-Hoon Min, Kyu-Chang Chun, Ki‐Bum Kim · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 259 citations

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