M. Stavrev

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

M. Stavrev, D. Fischer, Christian Wenzel et al. · Thin Solid Films · 1997 · 152 citations

Materials Science, Surface Characterization, Material Analysis +7

Behavior of thin Ta-based films in the Cu/barrier/Si system

M. Stavrev, D. Fischer, Frank Praessler et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 77 citations

Materials Engineering, Materials Science, Engineering +14

Sputtering of tantalum-based diffusion barriers in metallization: effects of gas pressure and composition

M. Stavrev, C. Wenzel, Andreas Möller et al. · Applied Surface Science · 1995 · 50 citations

Materials Science, Materials Engineering, Engineering +10

Study of nanocrystalline Ta(N,O) diffusion barriers for use in Cu metallization

M. Stavrev, D. Fischer, Andrea Preuß et al. · Microelectronic Engineering · 1997 · 26 citations

Materials Engineering, Materials Science, Diffusion Barriers +11

AFM Characterization of Ta-based Diffusion Barriers for Use in Future Semiconductor Metallization

D. Fischer, O. Meissner, Beatrice Bendjus et al. · Surface and Interface Analysis · 1997 · 14 citations

Engineering, Thin Film Process Technology, R.f.-sputter-deposited Ta +19