Concepedia

C. Wenzel

CW

Statistics

Publications

14

Citations

335

H-Index

11

Active since

1988

Affiliations

Technische Universität Dresden(Current)

Leibniz Institute for Solid State and Materials Research

Institute on Laser and Information Technologies

C. Wenzel is an author at Technische Universität Dresden specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1988–2009

14

Publications

14

Structure and thermal stability of graded Ta–TaN diffusion barriers between Cu and SiO2

René Hübner, M. Hecker, N. Mattern et al. · Thin Solid Films · 2003 · 67 citations

, , +7

Sputtering of tantalum-based diffusion barriers in metallization: effects of gas pressure and composition

M. Stavrev, C. Wenzel, Andreas Möller et al. · Applied Surface Science · 1995 · 50 citations

, , +10

Influence of nitrogen content on the crystallization behavior of thin Ta–Si–N diffusion barriers

René Hübner, M. Hecker, N. Mattern et al. · Thin Solid Films · 2004 · 43 citations

, , +9

Relationship between microstructure and electromigration damage in unpassivated PVD copper damascene interconnects

T.G. Koetter, H. Wendrock, H. Schuehrer et al. · Microelectronics Reliability · 2000 · 27 citations

, , +9

Metallization of sub-micron trenches and vias with high aspect ratio

P. Siemroth, C. Wenzel, Wolfgang Klimes et al. · Thin Solid Films · 1997 · 24 citations

, , +10

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