M. Hecker

Statistics

Publications

Citations

1.2K

H-Index

Active since

1992

Affiliations

Leibniz Institute for Solid State and Materials Research(Current)

Technische Universität Dresden

GlobalFoundries (Germany)

ExxonMobil (Germany)

ExxonMobil (United States)

M. Hecker is an author at Leibniz Institute for Solid State and Materials Research specializing in materials science, engineering, and applied physics.

ORCID

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsMaterials EngineeringSurface SciencePhysicsMicrostructureNanotechnologyMagnetism

Publications per year

1992–2024

Publications

Micro-Raman spectroscopy and analysis of near-surface stresses in silicon around through-silicon vias for three-dimensional interconnects

Suk-Kyu Ryu, Qiu Zhao, M. Hecker et al. · Journal of Applied Physics · 2012 · 110 citations

Engineering, Mechanical Engineering, Raman Measurements +20

Structure and thermal stability of graded Ta–TaN diffusion barriers between Cu and SiO2

René Hübner, M. Hecker, N. Mattern et al. · Thin Solid Films · 2003 · 67 citations

Materials Engineering, Materials Science, Material Analysis +7

Influence of nitrogen content on the crystallization behavior of thin Ta–Si–N diffusion barriers

René Hübner, M. Hecker, N. Mattern et al. · Thin Solid Films · 2004 · 43 citations

Materials Science, Material Analysis, Engineering +9

Annealing effects and degradation mechanism of NiFe/Cu GMR multilayers

M. Hecker, D. Tietjen, H. Wendrock et al. · Journal of Magnetism and Magnetic Materials · 2002 · 42 citations

Materials Engineering, Materials Science, Material Analysis +6

Effects of laser-induced heating on Raman stress measurements of silicon and silicon-germanium structures

Carsten Georgi, M. Hecker, Ehrenfried Zschech · Journal of Applied Physics · 2007 · 39 citations

Materials Science, Engineering, Physics +13

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