Concepedia

Wolfgang Klimes

WK

Statistics

Publications

2

Citations

34

H-Index

2

Active since

1997

Affiliations

Technische Universität Dresden(Current)

Wolfgang Klimes is an author at Technische Universität Dresden specializing in applied physics, microelectronics, and engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsPhotovoltaicsMicrostructureMaterial ScienceMicrofabricationIntegrated CircuitsElectronic PackagingMaterials Engineering

Publications per year

1997–1997

2

Publications

2

Metallization of sub-micron trenches and vias with high aspect ratio

P. Siemroth, C. Wenzel, Wolfgang Klimes et al. · Thin Solid Films · 1997 · 24 citations

Materials Science, Materials Engineering, Engineering +10

Gap filling with PVD processes for copper metallized integrated circuits

Christian Wenzel, N. Urbansky, Wolfgang Klimes et al. · Microelectronic Engineering · 1997 · 10 citations

Electrical Engineering, Electromigration Technique, Engineering +8

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